3D CFD for chemical transport profiles in a rotating disk CVD reactor

3D Research

Volumn 1, Issue 2, 2010, Pages 26-30

  Han, Jong Hyun ^a   Yoon, Do Young ^a  

^a Kwangwoon University   (South Korea)

Author keywords

3D CFD; buoyancy flow; centrifuge flow; Fluent; RDCVD

Indexed keywords

BUOYANCY; CENTRIFUGES; COMPUTATIONAL FLUID DYNAMICS; HEAT TRANSFER; ROTATING DISKS; VORTEX FLOW;

BUOYANCY FLOW; CHEMICAL TRANSPORT; FLOW AND HEAT TRANSFER; FLUENT; RDCVD; ROTATING DISK CVD REACTOR; SUBSTRATE TEMPERATURE; THICKNESS UNIFORMITY;

CHEMICAL VAPOR DEPOSITION;

EID: 78650658788     PISSN: None     EISSN: 20926731     Source Type: Journal    
DOI: 10.1007/3DRes.02(2010)05     Document Type: Review

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