On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 6, 2010, Pages

  Hosseini, Amir ^a   Kwong, David ^a   Zhang, Yang ^a   Chandorkar, Saurabh A ^b   Crnogorac, Filip ^b   Carlson, Andrew ^c   Fallah, Babak ^a   Bank, Seth ^a   Tutuc, Emanuel ^a   Rogers, John ^c   Pease, R Fabian W ^b   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

^b Stanford University   (United States)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; PHOTOLITHOGRAPHY; PHOTONIC DEVICES; SEMICONDUCTING SILICON COMPOUNDS; THREE DIMENSIONAL;

LASER BEAM STEERING SYSTEMS; NANOMEMBRANES; ONE-DIMENSIONAL BEAM; OPTICAL BEAM STEERING; OPTICAL LITHOGRAPHY; OPTICAL PHASED ARRAYS; PHOTONIC CIRCUITS; POTENTIAL SOLUTIONS; SELF-ALIGNED PATTERNING; SILICON ON INSULATOR; SILICON ON INSULATOR WAFERS; SINGLE LAYER; THREE-DIMENSIONAL (3D);

SILICON WAFERS;

EID: 78650168101     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3511508     Document Type: Article

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