Application of real time spectroscopic ellipsometry for analysis of roll-to-roll fabrication of Si:H solar cells on polymer substrates

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2010, Pages 631-636

  Dahal, Lila Raj ^a   Huang, Zhiquan ^a   Attygalle, Dinesh ^a   Sestak, Michelle N ^a   Salupo, Carl ^a   Sylvain Marsillac, ^a   Collins, R W ^a  

^a UNIVERSITY OF TOLEDO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACK REFLECTORS; DATA COLLECTION; DEPOSITION TIME; DEPOSITION ZONE; FLEXIBLE POLYMER SUBSTRATES; LAYER STACKS; LAYER THICKNESS; LEADING EDGE; MONITORING POINTS; MULTI-CHAMBER; OPTICAL MONITORING; OPTIMUM DEPOSITION; POLYMER SUBSTRATE; REAL TIME SPECTROSCOPIC ELLIPSOMETRY; ROLL TO ROLL; ROLL-TO-ROLL FABRICATION; SOLAR CELL STRUCTURES; STEADY STATE; ZNO LAYERS;

FILM GROWTH; FLIGHT DYNAMICS; MAGNETRONS; NUCLEATION; PHOTOVOLTAIC EFFECTS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC COATINGS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR CELLS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

DEPOSITION;

EID: 78650092727     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2010.5616856     Document Type: Conference Paper

References (3)

1. L.R. Dahal, D. Sainju, J. Li, J.A. Stoke, N.J. Podraza, X. Deng, and R.W. Collins, "Plasmonic characteristics of Ag/ZnO back-beflectors for thin film Si photovoltaics", 33rd IEEE PVSC, May 11-16, 2008, San Diego, CA, (IEEE, Piscataway NJ, 2008), Paper No. 167.
2. th World Conf. PV Energy Conversion, (IEEE, Piscataway NJ, 2006), p. 1732.
3. x:H versus Ge content, temperature, and processing: advances in optical function parameterization" , Materials Research Society Symposium Proceedings: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006, (MRS, Warrendale, 2006) Vol. 910, p. 259-264.