Dielectric functions of a-Si1-xGex:H versus ge content, temperature, and processing: Advances in optical function parameterization

Materials Research Society Symposium Proceedings

Volumn 910, Issue , 2007, Pages 259-264

  Podraza, Nikolas J ^a   Wronski, Christopher R ^b   Horn, Mark W ^b   Collins, Robert W ^a  

^a UNIVERSITY OF TOLEDO   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FUNCTIONS; MEASUREMENT TEMPERATURE; SURFACE CONTAMINATION;

DATABASE SYSTEMS; DIELECTRIC PROPERTIES; ELLIPSOMETRY; GERMANIUM ALLOYS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ANALYSIS;

AMORPHOUS SILICON;

EID: 34249943437     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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