Certification, self-calibration, and uncertainty in testing optical flats

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7656, Issue PART 1, 2010, Pages

  Evans, Chris J ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Calibration; certification; interferometry; optical testing; traceability

Indexed keywords

ACCEPTANCE TESTING; CERTIFICATION; EXTERNAL CALIBRATION; IN-SITU; ISO 17025; NATIONAL MEASUREMENT INSTITUTE; OPTICAL FLAT; OPTICAL QUALITY SURFACES; SELF CALIBRATION; SIZE RANGES; TRACEABILITY;

CALIBRATION; INTERFEROMETRY; MEASUREMENT THEORY; OPTICAL TESTING; QUALITY ASSURANCE; TECHNOLOGY;

UNCERTAINTY ANALYSIS;

EID: 78650033887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.865762     Document Type: Conference Paper

References (20)

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