Uncertainty evaluation for measurements of peak-to-valley surface form errors

CIRP Annals - Manufacturing Technology

Volumn 57, Issue 1, 2008, Pages 509-512

  Evans, Chris J ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Metrology; Spatially varying errors; Uncertainty

Indexed keywords

ACOUSTIC VARIABLES MEASUREMENT; MEASUREMENT THEORY; SPECIFICATIONS; UNCERTAINTY ANALYSIS;

PEAK-TO-VALLEY DEVIATION; UNCERTAINTY EVALUATION;

ERROR ANALYSIS;

EID: 43649095237     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2008.03.084     Document Type: Article

References (12)

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