Duplicated quartz template for 2.5 inch Discrete Track Media

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7488, Issue , 2009, Pages

  Yamashita, Noriko ^a   Oomatsu, Tadashi ^a   Wakamatsu, Satoshi ^a   Nishimaki, Katsuhiro ^a   Usa, Toshihiro ^a   Usuki, Kazuyuki ^a  

^a FUJIFILM CORPORATION   (Japan)

Author keywords

Discrete Track Media; Nano Imprint Lithography; Quartz template

Indexed keywords

DISCRETE TRACK MEDIA; ETCHING SELECTIVITY; HARD DISC; HARD MASKS; PATTERN HEIGHTS; QUARTZ SUBSTRATE; TEMPLATE FABRICATION; TRACK PITCH; TRANSMISSION EFFICIENCY;

ETCHING; FABRICATION; NANOIMPRINT LITHOGRAPHY; PHOTOMASKS; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; TEMPERATURE CONTROL; THERMAL EXPANSION;

QUARTZ;

EID: 78649808361     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.833466     Document Type: Conference Paper

References (7)

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