PLZT electro-optic modulators on Si substrates using aerosol deposition for on-chip optical interconnections

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2007, Pages 210-212

  Shimizu, T ^a   Nakada, M ^a   Tsuda, H ^b   Akedo, J ^b   Nishi, K ^a   Ohashi, K ^a  

^a SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL DEPOSITION; ELECTRO-OPTIC MODULATORS; EXTINCTION RATIOS; LANTHANUM-MODIFIED LEAD ZIRCONATE TITANATE; ON CHIPS; OPTICAL INTERCONNECTIONS; OPTICAL TRANSMISSIONS; PZT; RING RESONATOR; SI SUBSTRATES; TRANSMISSION LOSS;

ATMOSPHERIC AEROSOLS; ELECTROOPTICAL DEVICES; LEAD; LIGHT TRANSMISSION; OPTICAL INTERCONNECTS; PHOTONICS; RESPIRATORY MECHANICS; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; ZIRCONIUM;

LIGHT MODULATORS;

EID: 78649808018     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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