Aerosol deposition on transparent electro-optic films for optical modulators

IEICE Transactions on Electronics

Volumn E90-C, Issue 1, 2007, Pages 36-40

  Nakada, Masafumi ^a   Tsuda, Hiroki ^b   Ohashi, Keishi ^a   Akedo, Jun ^b  

^a NEC CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition; Electro optic; Film deposition method; Optical modulator

Indexed keywords

DEPOSITION; ELECTROOPTICAL EFFECTS; EPITAXIAL GROWTH; FILM GROWTH; LIGHT MODULATORS; OPTICAL DEVICES; OPTICAL FILMS;

AEROSOL DEPOSITION (AD); FILM DEPOSITION METHOD; THIN OXIDE FILMS; TRANSMITTANCE LOSS;

AEROSOLS;

EID: 33846436502     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e90-c.1.36     Document Type: Conference Paper

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