Cell projection use and multi column approach for throughput enhancement of EBDW system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7823, Issue PART 1, 2010, Pages

  Yamada, Akio ^a   Ooae, Yoshihisa ^a  

^a ADVANTEST CORPORATION   (Japan)

Author keywords

Character projection; Electron beam exposure system; High current density column; Multi column; Throughput

Indexed keywords

CELL PROJECTION; CHARACTER PROJECTIONS; COLUMN APPROACHES; COLUMN TECHNOLOGY; ELECTRON BEAM EXPOSURE SYSTEM; HIGH CURRENT DENSITIES; KEY TECHNOLOGIES; MIX-AND-MATCH; MULTI COLUMN; MULTI-COLUMN CELLS; PROOF OF CONCEPT; THROUGHPUT ENHANCEMENT;

BAR CODES; CURRENT DENSITY; ELECTRON BEAMS; PHOTOMASKS; TECHNOLOGY; THROUGHPUT;

ELECTRON BEAM LITHOGRAPHY;

EID: 78649806071     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.868975     Document Type: Conference Paper

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