Structural and optical properties of ZNO thin films prepared by different sol-gel processes

Chemical Engineering Communications

Volumn 198, Issue 4, 2011, Pages 494-503

  Liu, Aiyun ^a   Zhang, Jianqin ^a   Wang, Qinghai ^a  

^a Shandong Research Institute of Non metallic Materials   (China)

Author keywords

Anneal; Pre heat; Sol gel; ZNO thin film

Indexed keywords

ANNEAL; ANNEALING TEMPERATURES; PRE-HEAT; PRE-HEAT TREATMENT; QUARTZ GLASS SUBSTRATES; SOL-GEL METHODS; STRUCTURAL AND OPTICAL PROPERTIES; TRANSMISSION SPECTRA ANALYSIS; ZNO THIN FILM;

GELS; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; QUARTZ; SOL-GEL PROCESS; SOL-GELS; SOLS; SPIN GLASS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

FILM PREPARATION;

EID: 78649708338     PISSN: 00986445     EISSN: 15635201     Source Type: Journal    
DOI: 10.1080/00986445.2010.500168     Document Type: Article

References (26)

1. Aoki, T., Hatanaka, Y., and Look, D. C. (2000). ZnO diode fabricated by excimer-laser doping, Appl. Phys. Lett., 76, 3257-3258.
2. Bender, M., Gagaoudaikis, E., and Douloufakis, E. (2002). Production and characterization of zinc oxide thin films for room temperature ozone sensing, Thin Solid Films, 418, 45-50.
3. Cao, H., and Zhao, Y. G. (1998). Performance of ZnO thin films prepared by KrF laser, Appl. Phys., 73, 36-56.
4. Caseri, W. (2009). Inorganic nanoparticles as optically effective additives for polymers, Chemical Engineering Communication, 196, 549-572.
5. 0.4N n-type window layer, Journal of Crystal Growth, 248, 552-555.
6. Davies, R. P., Abernathy, C. R., and Pearton, S. J. (2009). Review of recent advances in transition and lanthanide metal-doped GaN and ZnO, Chemical Engineering Communication, 196, 1030-1053.
7. Fortunato, E., Assuncao, V., and Goncalves, A. (2004). High quality conductive galliumdoped zinc oxide films deposited at room temperature, Thin Solid Films, 451, 442-447.
8. Hsieh, P. T., Chen, Y. C., Kao, K. S., Lee, M. S., and Cheng, C. C. (2007). The ultraviolet emission mechanism of ZnO thin film fabricated by sol-gel technology, Journal of the European Ceramic Society, 27, 3815-3818.
9. Jiménez-González, A. E., Soto Urueta, J. A., and Suárez-Parra, R. (1998). Optical and electrical characteristics of aluminum-doped ZnO thin films prepared by solgel technique, Journal of Crystal Growth, 192, 430-438.
10. Kang, H. S., Kang, J. S., and Kim, J. W. (2004). Annealing effect on the property of ultraviolet and green emissions of ZnO thin films, J. Appl. Phys., 95, 1246-1250.
11. Kar, J. P., Das, S. N., and Lee, S. W. (2009). Surface modification of hydrothermally grown ZnO nanostructures with process parameters, Chemical Engineering Communication, 196, 1130-1138.
12. Khan, M. A., Kuznia, J. N., and Olson, D. T. (1992). High-responsivity photoconductive ultraviolet sensors based on insulating single-crystal GaN epilayers, Appl. Phys. Lett., 60(23), 2917-2919.
13. Klingshirm, C. (1975). The luminescence of ZnO under high one and two quantum excitation, Phys. Stat. Sol. B, 71, 547-559.
14. Lee, H. W., Lau, S. P., and Wang, Y. G. (2004). Structure, electrical and properties of Al-doped ZnO thin films by filtered cathodic vacuum arc technique, Journal of Crystal Growth, 268(3-4), 596-601.
15. Liang, S., Sheng, H., Liu, Y., Huo, Z., Lu, Y., and Shen, H. (2001). ZnO Schottky ultraviolet photodetectors, Journal of Crystal Growth, 225, 110-113.
16. Liu, K. W., Ma, J. G., Zhang, J. Y., Lu, Y. M., Jiang, D. Y., Li, B. H., Zhao, D. X., Zhang, Z. Z., Yao, B., and Shen, D. Z. (2007). Ultraviolet photoconductive detector with high visible rejection and fast photoresponse based on ZnO thin film, Solid-state Electronics, 51, 757-761.
17. xO films by radio frequency magnetron sputtering, Thin Solid Films, 372, 173-175.
18. 1-XN-based schottky barrier photodiodes, Appl. Phys., 88(4), 2081-2091.
19. Natsume, Y., and Sakata, H. (2000). Zinc oxide films prepared by sol-gel spin-coating, Thin Solid Films, 372, 30-36.
20. Purica, M., Budianu, E., and Rusu, E. (2000). Heterojunction with ZnO polycrystalline thin films for optoelectronic devices applications, Microelectronics Engineering, 51-52(5), 425-431.
21. 1-xO alloys, Appl. Phys. Lett., 75, 3327-3329.
22. Spanhel, L. (2006). Colloidal ZnO nanostructures and functional coatings: A survey, Sol-Gel Science Technology, 39, 7-24.
23. Srinivasan, G., and Kumar, J. (2006). Optical and structural characterisation of zinc oxide films prepared by sol-gel process, Cryst. Res. Technol., 41, 893-896.
24. Tang, E. J., Tian, B. Y., and Zheng, E. L. (2008). Preparation of zinc oxide nanoparticle via uniform precipitation method and its surface modification by methacryloxypropyltrimethoxysilane, Chemical Engineering Communication, 195, 479-491.
25. Xu, Z. Q., Deng, H., Xie, J., Li, Y., and Zu, X. T. (2006). Ultraviolet photoconductive detector based on Al doped ZnO films prepared by sol-gel method, Applied Surface Science, 253, 476-479.
26. Yu, Q., Yang, H., Fu, W., Chang, L., Xu, J., Yu, C., and Wei, R. (2007). Transparent conducting yttrium-doped ZnO films deposited by sol-gel method, Thin Solid Films, 515, 3840-3843.