Carbon nanotube integration into MEMS devices

Physica Status Solidi (B) Basic Research

Volumn 247, Issue 11-12, 2010, Pages 2635-2640

  Hanein, Yael ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Carbon nanotubes; CVD; MEMS; Self assembly

Indexed keywords

EID: 78649690647     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.201000109     Document Type: Article

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