Ultra small single walled carbon nanotube pressure sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 575-578

  Helbling, T ^a   Drittenbass, S ^a   Durrer, L ^a   Roman, C ^a   Hierold, C ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

GAUGE FACTORS; MEMBRANE FABRICATION; NANOSCALED; PIEZORESISTIVE GAUGE FACTOR; PIEZORESISTIVE PRESSURE SENSORS; POWER CONSUMPTION; SENSOR PERFORMANCE; SI WAFER; STRAIN GAUGE; STRAIN-DEPENDENT; ULTRA-SMALL;

ELECTRONIC PROPERTIES; FABRICATION; FIELD EFFECT TRANSISTORS; GAGES; PRESSURE EFFECTS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SINGLE-WALLED CARBON NANOTUBES (SWCN);

CARBON NANOTUBES;

EID: 65949098915     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805447     Document Type: Conference Paper

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