Texturization of mono-crystalline silicon solar cells in TMAH without the addition of surfactant

Journal of Semiconductors

Volumn 31, Issue 10, 2010, Pages

  Weiying, Ou ^a,b   Yao, Zhang ^a   Hailing, Li ^a   Lei, Zhao ^a   Chunlan, Zhou ^a   Hongwei, Diao ^a   Min, Liu ^a   Weiming, Lu ^a   Jun, Zhang ^a   Wenjing, Wang ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (China)

^b GUILIN UNIVERSITY OF ELECTRONIC TECHNOLOGY   (China)

Author keywords

Silicon solar cell; Texturization; TMAH

Indexed keywords

CRYSTALLINE SILICON SOLAR CELLS; ETCHING MECHANISM; ETCHING PROCESS; ETCHING RATE; SURFACE REFLECTANCE; TETRAMETHYL AMMONIUM HYDROXIDE; TEXTURED SURFACE; TEXTURIZATION; TMAH;

ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; SILICON SOLAR CELLS; SILICON WAFERS; SOLAR CELLS; SURFACE ACTIVE AGENTS; SURFACE CHEMISTRY; THERMOANALYSIS;

SURFACE MORPHOLOGY;

EID: 78649436092     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/31/10/106002     Document Type: Article

References (15)

1. Wenham S R, Green M A. Silicon solar cell. Progress in photovoltaic research and application, 1996, 4: 3
2. Green M A. High efficiency silicon cells. SPIE, 1999, 3894: 65
3. Campbell P, Green M A. Light trapping properties of pyramidally textured surface. J Appl Phys, 1987, 62(2): 243
4. Rodrfguez J M, Tobias I, Luque A. Random pyramidal texture modeling. Solar Energy Materials & Solar Cells, 1997, 45: 241
5. Gangopadhyay U, Dhungel S K, Mondal A K, et al. Novel lowcost approach for removal of surface contamination before texturization of commercial monocrystalline silicon solar cells. Solar Energy Materials & Solar Cells, 2007, 91:1147
6. Kwon S, Yi J, Yoon S, et al. Effects of textured morphology on the short circuit current of single crystalline silicon solar cells: evaluation of alkaline wet-texture processes. Current Appl Phys, 2009, 9: 1310
7. Gangopadhyay U, Kim K, Dhungel S K, et al. Low-cost texturization of large-area crystalline silicon solar cells using hydrazine mono-hydrate for industrial use. Renewable Energy, 2006, 31: 1906
8. Gangopadhyay U, Kim K, Kandol A, et al. Role of hydrazine monohydrate during texturization of large-area crystalline silicon solar cell fabrication. Solar Energy Materials & Solar Cells, 2006, 90: 3094
9. Chu A K, Wang J S, Tsai Z Y, et al. A simple and cost-effective approach for fabricating pyramids on crystalline silicon wafers. Solar Energy Materials & Solar Cells, 2009, 93: 1276
10. You J S, Kim D, Huh J Y, et al. Experiments on anisotropic etching of Si in TMAH. Solar Energy Materials & Solar Cells, 2001, 66: 37
11. Iencinella D, Centurioni E, Rizzoli R, et al. An optimized texturing process for silicon solar cell substrates using TMAH. Solar Energy Materials & Solar Cells, 2005, 87: 725
12. Papet P, Nichiporuk O, Kaminski A, et al. Pyramidal texturing of silicon solar cell with TMAH chemical anisotropic etching . Solar Energy Materials & Solar Cells, 2006, 90: 2319
13. Tabata O. pH-controlled TMAH etchants for silicon micromaching. Sensors and Actuators A, 1996, 53: 335
14. Zubel I, Kramkowska M. The effect of isopropyl alcohol on etching rate and roughness of (100) Si surface etched in KOH and TMAH solutions. Sensors and Actuators A, 2001, 93: 138
15. Sundaram K B, Vijayakumar A, Subramanian G. Smooth etching of silicon using TMAH and isopropyl alcohol for MEMS applications. Microelectron Eng, 2005, 77: 230