Formation of In2 O3 nanorings on Si substrates

Applied Physics Letters

Volumn 97, Issue 18, 2010, Pages

  Hsin, C L ^a   Yu, S Y ^a   Huang, C W ^a   Wu, W W ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT PROCESSING; DIRECT INTEGRATION; FORMATION PROCESS; METAL OXIDES; NANO SPHERE LITHOGRAPHY; NEW APPROACHES; PROPERTY MEASUREMENT; SI SUBSTRATES; SILICON-BASED PHOTONIC DEVICE;

METALLIC COMPOUNDS; NANORINGS; NANOSPHERES; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PHOTONIC DEVICES; POLYSTYRENES;

INDIUM;

EID: 78649293986     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3511539     Document Type: Article

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