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Volumn 3, Issue 10, 2010, Pages
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Mono-material multilayer interference optical filter with sub-wavelength structure for infrared and terahertz optics
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION;
HIGHLY SENSITIVE;
HOMOGENEOUS COMPOSITION;
INFRARED OBSERVATIONS;
INFRARED WAVELENGTHS;
INTERFERENCE FILTERS;
KEYPOINTS;
MICROELECTROMECHANICAL SYSTEMS;
MULTILAYER INTERFERENCE;
OPTICAL CHARACTERISTICS;
SUB-WAVELENGTH STRUCTURES;
TERA HERTZ;
THERMAL CYCLE;
LIGHT POLARIZATION;
MICROELECTROMECHANICAL DEVICES;
MULTILAYERS;
OPTICAL FILTERS;
REFRACTIVE INDEX;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
OPTICAL MULTILAYERS;
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EID: 78549263707
PISSN: 18820778
EISSN: 18820786
Source Type: Journal
DOI: 10.1143/APEX.3.102503 Document Type: Article |
Times cited : (25)
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References (21)
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