Porous silicon filters for low-temperature far IR applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5883, Issue , 2005, Pages 1-8

  Kochergin, Vladimir ^a   Sanghavi, Mahavir ^a   Swinehart, Philip R ^a  

^a Lake Shore Cryotronics Inc   (United States)

Author keywords

Electrochemical etching of multilayer structures; Far IR filters; Porous Silicon

Indexed keywords

CRYOGENICS; ELECTROMAGNETIC WAVE INTERFERENCE; INFRARED DEVICES; POROUS SILICON; SILICON WAFERS; SINGLE CRYSTALS;

ELECTROCHEMICAL ETCHING OF MULTILAYER STRUCTURES; FAR IR FILTERS; SINGLE-CRYSTAL SILICON WAFERS; TRANSMISSION SPECTRUM;

OPTICAL FILTERS;

EID: 29244485484     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.615700     Document Type: Conference Paper

References (14)

1. M. Christophersen, V. Kochergin, P.R. Swinehart, "Macroporous Silicon filters for mid-to-far IR range", Proc. SPIE Vol. 5524, p. 158, (2004).
2. G. Vincent, "Optical-properties of porous silicon superlattices" Appl. Phys. Lett., 64 (18), p. 2367, (1994).
3. V. Pellegrini, A. Tredicucci, C. Mazzoleni, L. Pavesi, "Enhanced optical-properties in porous silicon microcavities" Phys. Rev. B 52, 14328 (1995).
4. Allongue, in INSPEC Data series, L. Canham, Editor, IEE (1997).
5. V. Lehmann, Electrochemistry of silicon, WILEY-VCH, Weinheim (2002).
6. X. G. Zhang, Electrochemistry of silicon and its oxide, Kluwer Academic/Plenum Publ., New York (2001).
7. H. Föll, M. Christophersen, J. Carstensen, and G. Hasse, "Formation and application of porous silicon", Materials Science and Engineering R, 39 (4), 93-141, (2002).
8. V.Yu. Timoshenko, T. Dittrich, F. Koch, "Infrared free charge carriers in mesoporous silicon", Phys. Rev. B, 64 (2001), p. 085314
9. F. Geobaldo, P. Rivolo, G.P. Salvador, G. Amato, L. Boarino, E. Garrone, "Free carriers reactivation on p(+)-mesoporous silicon through ammonia adsorption: A FTIR study", Sensors and Actuators B, 100 (1-2), p. 205-208, (2004).
10. U.Gösele & Q.-Y. Tong, "Semiconductor wafer bonding", Annual Review of Materials Science, Vol. 28, p. 215-241, (1998)
11. Mulloni V., Pavesi L., "Electrochemically oxidized porous silicon microcavities", Mat. Sci. Eng. B-Solid. 69: 59-65 Sp. Iss. SI, Jan. 2000
12. Macleod H.A., Thin-Film Optical Filters, 3rd ed., Institute of Physics Publishing, 2001
13. K.R. Armstorng and F.J. Low, "Far-infrared filters utilizing small particle scattering and antireflection coatings" Appl. Optics., 13(2), p.425, (1974)
14. M. Christophersen, J. Carstensen, A. Feuerhake, H. Foil, "Crystal Orientation and Electrolyte dependence fore Macropore Nucleation and satbele Growth on p-tye-silicon", Mat. Sci. Eng. B, 69-70, 194 (2000)