Development of spider micro-structured optical arrays for X-ray optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7803, Issue , 2010, Pages

  Rodriguez Sanmartin, Daniel ^a   Zhang, Dou ^a   Button, Tim ^a   Meggs, Carl ^a   Atkins, Carolyn ^b   Doel, Peter ^b   Brooks, David ^b   Feldman, Charlotte ^c   Willingale, Richard ^c   Michette, Alan ^d   Pfauntsch, Slawka ^d   Sahraei, Shahin ^d   Shand, Matthew ^d   James, Ady ^e   Willis, Graham ^e   Dunare, Camelia ^f   Stevenson, Tom ^f   Parkes, William ^f   Smith, Andy ^g  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

^c UNIVERSITY OF LEICESTER   (United Kingdom)

^d KING'S COLLEGE LONDON   (United Kingdom)

^e UNIVERSITY COLLEGE LONDON   (United Kingdom)

^f UNIVERSITY OF EDINBURGH   (United Kingdom)

^g DARESBURY LABORATORY   (United Kingdom)

Author keywords

Finite Element Analysis; Micro structured optical arrays; Piezoelectric actuators; PZT; Smart X ray Optics

Indexed keywords

ACTIVE AREA; ALIGNED ARRAYS; CHARACTERISATION; DEVICE DESIGN; DEVICE PERFORMANCE; FINITE ELEMENT ANALYSIS; FOCAL LENGTHS; GRAZING INCIDENCE; OPTICAL ARRAYS; PLASTIC PROCESSING; PROTOTYPE DEVICES; PROTOTYPE STRUCTURES; PZT; RADIUS OF CURVATURE; SILICON CHANNEL; SILICON CHIP; WET-ETCH;

FINITE ELEMENT METHOD; PIEZOELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE ROUGHNESS; SURFACE STRUCTURE; WET ETCHING; X RAY ANALYSIS; X RAY OPTICS; X RAYS;

PIEZOELECTRIC ACTUATORS;

EID: 78549236113     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.860420     Document Type: Conference Paper

References (15)

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