Novel microstructured adaptive X-ray optics

Journal De Physique. IV : JP

Volumn 104, Issue , 2003, Pages 277-280

  Michette, A G ^a   Prewett, P D ^b   Powell, A K ^a   Pfauntsch, S J ^a   Atkinson, K D ^c   Boonliang, B ^b  

^a KING'S COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^c MOUNT VERNON HOSPITAL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; OPTICAL DESIGN; OPTICAL DEVICES; PERFORMANCE; PHOTOLITHOGRAPHY;

CONFOCAL X RAY MICROSCOPY; CURRENT GRAZING INCIDENCE OPTICS; EXTREME ULTRAVIOLET LITHOGRAPHY; MICROSTRUCTURED ADAPTIVE X RAY OPTICS; MICROSTRUCTURED OPTICAL ARRAYS; X RAY MICROPROBING;

X RAY OPTICS;

EID: 0038363927     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:200300080     Document Type: Conference Paper

References (6)

1. Michette A.G. and Prewett P.D., "X-ray imaging", UK Patent Application No. 9927631.3 (1999).
2. Prewett P.D. and Michette A.G., Proc. SPIE 4145 (2001) 180-187.
3. Kiihamäki J. and Franssila S., J. Vac. Sci. Technol. A17 (1999) 2280-2285.
4. Van Kan J.A., Bettiol A.A. and Watt F., Nucl. Instrum. Methods Phys. Res. B181 (2001) 258-262
5. Folkard M., Schettino G., Vojnovic B., Gilchrist S., Michette A.G., Pfauntsch S.J., Prise K.M. and Michael B.D., Radiation Research (2001) 156 796-804.
6. Michette A.G. and Cave R.C., "X-ray microscopy - possibilities for three-dimensional imaging", Multidimensional Microscopies, Taipei 1991, edited by P.C. Cheng, T.H. Lin, W.L. Lu and J.L. Wu (Springer, New York 1994) pp. 123-132.