Texture of CoSi2 films on Si(111), (110) and (001) substrates

Thin Solid Films

Volumn 519, Issue 4, 2010, Pages 1277-1284

  De Keyser, K ^a   Detavernier, C ^a   Jordan Sweet, J ^b   Lavoie, C ^b  

^a GHENT UNIVERSITY   (Belgium)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Axiotaxy; Epitaxy; Silicide; Texture

Indexed keywords

AXIOTAXY; CO FILMS; EPITAXY; LATTICE PLANE; POLYCRYSTALLINE; SI (1 1 1); SUBSTRATE ORIENTATION; TEXTURE COMPONENTS;

ALIGNMENT; COBALT; EPITAXIAL GROWTH; SILICIDES; SILICON; TEXTURES;

SUBSTRATES;

EID: 78349310075     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.09.026     Document Type: Article

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