Epitaxial CoSi2 by solid phase reaction of Co/Ti and Co/Hf bilayers on Si(001)

Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 171-175

  Falke, M ^a   Gebhardt, B ^a   Beddies, G ^a   Teichert, S ^a   Hinneberg, H J ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EPITAXIAL GROWTH; PHASE TRANSITIONS; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

BILAYERS; SOLID PHASE REACTIONS;

COBALT COMPOUNDS;

EID: 0034818895     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00444-5     Document Type: Article

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