Surface effects on the dynamic behavior of nanosized thin film resonator

Applied Physics Letters

Volumn 97, Issue 17, 2010, Pages

  Choi, Jinbok ^a   Cho, Maenghyo ^b   Kim, Wonbae ^b  

^a POSCO   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC BEHAVIORS; FINITE ELEMENT MODELS; HIGH SURFACE-TO-VOLUME RATIO; MODE SHAPES; MOLECULAR DYNAMICS SIMULATIONS; MULTI-SCALE DYNAMICS; NANO ELECTROMECHANICAL SYSTEMS; NANO-SIZED; SURFACE EFFECT; THIN FILM RESONATORS;

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MOLECULAR DYNAMICS; RESONATORS; THIN FILMS; VAPOR DEPOSITION;

FILM THICKNESS;

EID: 78149453351     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3502486     Document Type: Article

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