Structural and optical properties of textured ZnO:Al films on glass substrates prepared by in-line rf magnetron sputtering

Solar Energy Materials and Solar Cells

Volumn 95, Issue 1, 2011, Pages 190-194

  Cho, Jun Sik ^a   Kim, Young Jin ^a   Lee, Jeong Chul ^a   Park, Sang Hyun ^a   Yoon, Kyung Hoon ^a  

^a Korea Institute of Energy Research (KIER)   (South Korea)

Author keywords

Solar cell; Surface morphology; ZnO:Al film

Indexed keywords

AS-DEPOSITED FILMS; BOTTOM CELLS; DEPOSITION PARAMETERS; ETCHING CONDITION; EXPERIMENTAL CONDITIONS; GLASS SUBSTRATES; HAZE FACTORS; IN-LINE; INITIAL FILM; LONG WAVELENGTH; LOW RESISTIVITY; OPTICAL TRANSMITTANCE; PREFERRED ORIENTATIONS; RF-MAGNETRON SPUTTERING; SCATTERING PROPERTY; SILICON THIN FILM; STRUCTURAL AND OPTICAL PROPERTIES; SUBSTRATE TEMPERATURE; SURFACE FEATURE; TANDEM STRUCTURE; VISIBLE RANGE; WET-ETCHING PROCESS; WORKING PRESSURES; ZNO; ZNO:AL FILMS;

ALUMINUM; ANGULAR DISTRIBUTION; GLASS; LIGHT SCATTERING; MAGNETRON SPUTTERING; METALLIC FILMS; MICROSTRUCTURE; MORPHOLOGY; OPTICAL PROPERTIES; PRESSURE EFFECTS; REFRACTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR CELLS; STRUCTURE (COMPOSITION); SUBSTRATES; SURFACE MORPHOLOGY; SWITCHING CIRCUITS; THIN FILMS; WET ETCHING; ZINC OXIDE;

FILM PREPARATION;

EID: 78149359639     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.03.032     Document Type: Conference Paper

References (10)

1. W. Beyer, J. Hpkes, and H. Stiebig Transparent conducting oxide films for thin film silicon photovoltaics Thin Solid Films 516 2007 147 154
2. M. Berginski, J. Hpkes, W. Reetz, B. Rech, and M. Wuttig Recent development on surface-textured ZnO:Al films prepared by sputtering for thin-film solar cell application Thin Solid Films 516 2007 5836 5841
3. O. Kluth, B. Rech, S. Wieder, G. Schpe, C. Beneking, H. Wagner, A. Lffl, and H.W. Schock Texture etched ZnO:Al coated glass substrates for silicon based thin film solar cells Thin Solid Films 351 1999 247 253 (Pubitemid 32213766)
4. 2 substrates J. Appl. Phys. 92 2002 749 755
5. O. Kluth, G. Schpe, J. Hpkes, C. Agashe, J. Mller, and B. Rech Modified Thorton model for magnetron sputtered zinc oxide: film structure and etching behavior Thin Solid Films 442 2003 80 85
6. J. Hpkes, B. Rech, O. Kluth, T. Repmann, B. Zwaygardt, J. Mller, R. Drese, and M. Wuttig Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin film solar cells Sol. Energy Sol. Mater. 90 2006 3054 3060
7. O. Kluth, G. Schpe, B. Rech, R. Menner, M. Oertel, K. Orgassa, and H.W. Schock Comparative material study on RF and DC magnetron sputtered ZnO:Al films Thin Solid Films 502 2006 311 316
8. J.C. Lee, V. Dutta, J. Yoo, J. Yi, J. Song, and K.H. Yoon Superstrate pin a-Si:H solar cells on textured ZnO:Al front transparent conduction oxide Superlattices Microstruct. 42 2007 369 374
9. C. Agashe, O. Kluth, J. Hpkes, U. Zastrow, and B. Rech Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films J. Appl. Phys. 95 2004 1911 1917
10. H. Sakai, T. Yoshida, T. Hama, and Y. Ichikawa Effects of surface morphology of transparent electrode on the open-circuit voltage in a-Si:H solar cells Jpn. J. Appl. Phys. 29 1990 630 635