Wafer sort bitmap data analysis using the PCA-based approach for yield analysis and optimization

IEEE Transactions on Semiconductor Manufacturing

Volumn 23, Issue 4, 2010, Pages 493-502

  Hsieh, Yeou Lang ^a,b   Tzeng, Gwo Hshiung ^b   Lin, Grace Tyng Ruu ^b   Yu, Hsiao Cheng ^b  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Bitmap; cluster analysis; discriminate analysis; principal component analysis (PCA); yield analysis; yield loss space

Indexed keywords

BITMAP; DISCRIMINATE ANALYSIS; PRINCIPAL COMPONENT ANALYSIS (PCA); YIELD ANALYSIS; YIELD LOSS;

CLUSTER ANALYSIS; FAILURE ANALYSIS; QUALITY ASSURANCE;

PRINCIPAL COMPONENT ANALYSIS;

EID: 78149240917     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2010.2065510     Document Type: Article

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