Application of a bitmap analysis system to the forefront of DRAM devices development

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 222-227

  Hamada, Takehiko ^a   Sugimoto, Masaaki ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; INSPECTION; PATTERN RECOGNITION; PRODUCTIVITY; RANDOM ACCESS STORAGE; SILICON WAFERS;

BITMAP ANALYSIS; MASS PRODUCTION; YIELD ENHANCEMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031345520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)