A bubble-activated micropump with high-frequency flow reversal

Sensors and Actuators, A: Physical

Volumn 163, Issue 2, 2010, Pages 501-509

  Chan, Shih Chi ^a   Chen, Chia Ray ^b   Liu, Cheng Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL SPACE ORGANIZATION   (Taiwan)

Author keywords

Bubble activated micropump; Electronic cooling; MEMS; Microfluidic

Indexed keywords

APPLIED VOLTAGES; ELASTIC SHEETS; ELECTRONIC COOLING; EMBEDDED ELECTRODES; FLOW REVERSALS; FLUIDIC MICROCHANNELS; GLASS SUBSTRATES; HEAT DISSIPATION; HEAT DISSIPATION RATES; HIGH FREQUENCY HF; MAXIMUM FLOW RATE; MICRO PUMP; MICROFLUIDIC CHAMBERS; MOLD MATERIALS; NEGATIVE PHOTORESISTS; PHOSPHATE BUFFER SOLUTIONS; POLYDIMETHYLSILOXANE PDMS; SILICON SUBSTRATES; THERMAL MANAGEMENT;

COOLING; COOLING SYSTEMS; MICROCHANNELS; MICROELECTRODES; MICROFLUIDICS; PHOTORESISTS; SILICONES; SUBSTRATES; X RAY LITHOGRAPHY;

PUMPS;

EID: 78049475961     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.08.026     Document Type: Article

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