An electrolysis-bubble-actuated micropump based on the roughness gradient design of hydrophobic surface

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1095-1105

  Cheng, Chih Ming ^a   Liu, Cheng Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bubble; Electrolysis; Microelectromechanical systems (MEMS) micropump; Roughness gradient; Surface tension

Indexed keywords

CONTACT ANGLE; ELECTROLYSIS; MICROCHANNELS; MICROMACHINING; SURFACE ROUGHNESS; SURFACE TENSION;

CHOKING/STICKING PHENOMENA; ELECTROLYSIS-BUBBLE-ACTUATED MICROPUMP; LIQUID DISPLACEMENT; TIME-SEQUENCE POWER CONTROL;

MEMS;

EID: 35148814582     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.900880     Document Type: Article

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