A water-tight packaging of MEMS electrostatic actuators for biomedical applications

Microsystem Technologies

Volumn 16, Issue 12, 2010, Pages 2109-2113

  Erismis, M A ^a   Pereira Neves, H ^a   De Moor, P ^a   Puers, R ^a,b   Van Hoof, C ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL APPLICATIONS; FLIP CHIP; INCHWORM ACTUATORS; PACKAGING TECHNIQUES; THERMAL BONDING; WALL STRUCTURE; WATER INGRESS;

ACTUATORS; CHIP SCALE PACKAGES; ELECTROSTATICS;

ELECTROSTATIC ACTUATORS;

EID: 78049463963     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1136-3     Document Type: Article

References (13)

1. Dy E, Ho CM (2009) Development of a cytomic force transducer for experimental mechanobiology. MEMS'09, pp 391-394
2. MA Erismis HP Neves R Puers C Van Hoof 2008 A low voltage, large displacement, large force inchworm actuator IEEE J Microelectromech Sys 17 1294 1301 10.1109/JMEMS.2008.2004852
3. MA Erismis HP Neves P De Moor C Van Hoof R Puers 2009 Low voltage electrostatic inchworm actuators in aqueous environments Procedia Chem Eurosensors 1 686 689 10.1016/j.proche.2009.07.171
4. Lal A (1998) Silicon-based ultrasonic surgical actuators. 20th Annual Int. Conf. of the IEE Eng. in Medicine and Biology Society, pp 2785-2790
5. Lee AP, Ciarlo DR, Krulevitch PA, Lehev S, Trevino J, Northrup MA (1995) A practical microgripper by fine alignment, euthectic bonding and SMA actuator. Transducers, pp 368-371
6. Miller K, Cowen A, Hames G, Hardy B (2008) SOIMUMPs Design Hand book. http://www.memscap.com/mumps/documents/SOIMUMPs.dr.v5.pdf
7. J Muthuswamy M Okandan T Jain A Giletti 2005 Electrostatic microactuators for precise positioning of eural microelectrodes IEEE Tras Biomed Eng 52 1748 1755 10.1109/TBME.2005.855712
8. HV Panchawagh FF Faheem CF Heremann DB Serrell DS Finch RL Mahajan 2007 A flip-chip encapsulation method for packaging of MEMS actuators using surface micromachined polysilicon caps for BioMEMS applications Sens Actuators A Phsy 134 11 19 10.1016/j.sna.2006.05.013
9. TL Sounart TA Michaske KR Zavadil 2005 Frequency dependent electrostatic actuation in microfludic MEMS IEEE J Microelectromech Sys 14 125 133 10.1109/JMEMS.2004.839006
10. KD Wise 2007 Integrated sensors, MEMS, and microsystems: reflections on a fantastic voyage Sens Actuators A Phsy 136 39 50 10.1016/j.sna.2007.02.013
11. KD Wise JB Angell A Starr 1970 An integrated circuit approach to extracellular microelectrodes IEEE Trans Biomed Eng 17 238 247 10.1109/TBME.1970.4502738
12. Z Yoshimitsu A Nakajima T Watanabe K Hashimoto 2002 Effects of surface structure on the hydrophobicity and sliding behavior of water droplets Langmuir 18 5818 5822 10.1021/la020088p
13. R Zengerle J Ulrich S Kluge M Richter A Richter 1995 A bidirectional silicon micropump Sens Actuators A Phsy 50 81 86 10.1016/0924-4247(96)80088-4