Recent upgrades to the Diamond-NOM: A slope measuring profiler capable of characterizing the surface profile of large optics with sub-nanometer repeatability

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7801, Issue , 2010, Pages

  Alcock, Simon G ^a   Sawhney, Kawal J S ^a   Scott, Stewart ^a  

^a DIAMOND LIGHT SOURCE LTD   (United Kingdom)

Author keywords

Diamond NOM; metrology; slope errors; slope measuring profiler; synchrotron optics

Indexed keywords

BEAM LINES; LARGE OPTICS; METROLOGY; METROLOGY INSTRUMENTS; METROLOGY TOOLS; NANOMETER REPEATABILITY; NANOMETRES; NON-CONTACT; OPERATIONAL CAPABILITIES; POTENTIAL PROBLEMS; SLOPE ERRORS; SLOPE MEASURING PROFILER; SURFACE PROFILES; SYNCHROTRON OPTICS; TECHNICAL DETAILS;

ERRORS; MEASUREMENTS; SURFACE TOPOGRAPHY; SYNCHROTRONS; X RAYS;

DIAMONDS;

EID: 78049378987     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.861623     Document Type: Conference Paper

References (5)

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3. Alcock S. G. et al, "The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability," Nucl. Instr. and Meth. A 616, 224-228 (2010).
4. Sutter J.P., Amboage M., Hayama S., Díaz-Moreno S.,"Geometrical and wave-optical effects on the performance of a bent-crystal dispersive X-ray spectrometer" Nucl. Instr. and Meth. A 621, 627-636 (2010).
5. Sawhney, K. J. S., Alcock, S. G., and Signorato, R., "A Novel EEM Super-polished, Adaptive Bimorph Optic with Sub-nanometre Dynamical Figure Control." Proc. SPIE 7803 (2010)