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Volumn 616, Issue 2-3, 2010, Pages 110-114
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A preferential coating technique for fabricating large, high quality optics
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Author keywords
Diamond NOM; Metrology; Optics; Preferential deposition; Synchrotron mirrors
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Indexed keywords
DIFFERENTIAL COATINGS;
FIGURE ERROR;
HIGH QUALITY;
ITERATIVE CYCLES;
METROLOGY;
PREFERENTIAL DEPOSITION;
SILICON MIRRORS;
SLOPE ERRORS;
SYNCHROTRON MIRRORS;
TECHNICAL DEMANDS;
COATINGS;
DIAMONDS;
ERRORS;
FREE ELECTRON LASERS;
LASERS;
SYNCHROTRONS;
MIRRORS;
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EID: 77950872083
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2009.10.097 Document Type: Article |
Times cited : (21)
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References (5)
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