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Volumn 101, Issue 3, 2010, Pages 491-495

Production of microstructures in wide-band-gap and organic materials using pulsed laser ablation at 157 nm wavelength

Author keywords

[No Author keywords available]

Indexed keywords

3D MICROSTRUCTURES; ABLATION RATES; FLUENCES; HIGH-PRECISION; LASER BEAM PARAMETERS; LASER MICRO-MACHINING; MAGNESIUM FLUORIDE; MICRO STRUCTURING; NEW RESULTS; ORGANIC MATERIALS; PULSED LASER ABLATION; THRESHOLD FLUENCES; WIDE BAND GAP;

EID: 78049351749     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-010-5964-x     Document Type: Article
Times cited : (6)

References (8)
  • 1
    • 0002951691 scopus 로고    scopus 로고
    • ed. by Shields, H., Dyer, P.E. Excimer lasers, optics, and applications
    • P.R. Herman et al., ed. by Shields, H., Dyer, P.E. Excimer lasers, optics, and applications. SPIE Proc. 2992, (1997) 86-95
    • (1997) SPIE Proc. , vol.2992 , pp. 86-95
    • Herman, P.R.1
  • 3
    • 0347925044 scopus 로고    scopus 로고
    • 10.1007/s00339-002-1467-8 2003ApPhA.76.751I
    • J. Ihlemann, et al. 2003 Appl. Phys. A 76 5 751 753 10.1007/s00339-002- 1467-8 2003ApPhA..76..751I
    • (2003) Appl. Phys. A , vol.76 , Issue.5 , pp. 751-753
    • Ihlemann, J.1
  • 4
    • 2342595839 scopus 로고    scopus 로고
    • 10.1117/12.540527 2003SPIE.5063.233T
    • T. Temme, et al. 2003 Proc. SPIE 5063 233 237 10.1117/12.540527 2003SPIE.5063..233T
    • (2003) Proc. SPIE , vol.5063 , pp. 233-237
    • Temme, T.1
  • 7
    • 84894506223 scopus 로고    scopus 로고
    • Eugen G. Leuze Verlag Bad Saulgau ISBN 978-3-87480-245-1
    • S. Weimantel et al., in Jahrbuch Oberflächentechnik, Band 64 (Eugen G. Leuze Verlag, Bad Saulgau, 2008) pp. 359-370. ISBN 978-3-87480-245-1
    • (2008) Jahrbuch Oberflächentechnik Band 64 , pp. 359-370
    • Weimantel, S.1
  • 8
    • 78049340074 scopus 로고    scopus 로고
    • D. Basting G. Marowsky (eds). Springer Berlin
    • P.R. Herman, in Excimer Laser Technology, ed. by D. Basting, G. Marowsky (Springer, Berlin, 2005), p. 229
    • (2005) Excimer Laser Technology , pp. 229
    • Herman, P.R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.