Preparation and characterization of alkoxide-derived lead-free piezoelectric barium zirconate titanate thin films with different compositions

Japanese Journal of Applied Physics

Volumn 49, Issue 9 PART 2, 2010, Pages

  Ohno, Tomoya ^a   Uchida, Kazuhisa ^b   Sakamoto, Naonori ^b   Fu, Desheng ^b   Wakiya, Naoki ^b   Matsuda, Takeshi ^a   Suzuki, Hisao ^b  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALKOXIDES; BZT THIN FILMS; CHEMICAL SOLUTION DEPOSITION; DIELECTRIC AND FERROELECTRIC PROPERTIES; ELECTRICAL PROPERTY; LANTHANUM NICKEL OXIDES; LEAD-FREE; LEAD-FREE PIEZOELECTRICS; PIEZOELECTRIC FORCE; SEEDING LAYERS; SI SUBSTRATES; ZIRCONATE TITANATE;

BARIUM; BARIUM ZIRCONATE; CRYSTAL ORIENTATION; CRYSTAL SYMMETRY; ELECTRIC PROPERTIES; FERROELECTRIC FILMS; FILM PREPARATION; LANTHANUM OXIDES; NICKEL OXIDE; OXIDE FILMS; PIEZOELECTRICITY; SINGLE CRYSTALS; THIN FILMS; VAPOR DEPOSITION; ZIRCONIUM;

BARIUM TITANATE;

EID: 78049345995     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.09MA11     Document Type: Conference Paper

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