Annealing effects on sensitivity of atomic-layer-deposited SrTiO 3-based oxygen sensors

Japanese Journal of Applied Physics

Volumn 49, Issue 9 PART 2, 2010, Pages

  Hara, Toru ^a   Ishiguro, Takashi ^a   Shinozaki, Kazuo ^b  

^a TAIYO YUDEN CO LTD   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING EFFECTS; ANNEALING TEMPERATURES; ATOMIC LAYER DEPOSITED; HIGH SENSITIVITY; IN-SITU MONITORING; KEY PARAMETERS; MANUFACTURING PROCESS; ROOM TEMPERATURE; SEMICONDUCTIVE; SRTIO; TRACE LEVEL;

DEPOSITION; LIGHT EMITTING DIODES; ORGANIC LIGHT EMITTING DIODES (OLED); OXYGEN; SEGREGATION (METALLOGRAPHY); STRONTIUM ALLOYS; THIN FILMS;

SURFACE SEGREGATION;

EID: 78049326599     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.09MA15     Document Type: Conference Paper

References (24)

1. T. Hara, T. Ishiguro, N. Wakiya, and K. Shinozaki: Jpn. J. Appl. Phys. 47 (2008) 7486.
2. T. Hara, T. Ishiguro, N. Wakiya, and K. Shinozaki: Mater. Sci. Eng. B 161 (2009) 142.
3. T. Hara and T. Ishiguro: Sens. Actuators B 136 (2009) 489.
4. T. Hara and T. Ishiguro: Jpn. J. Appl. Phys. 48 (2009) 09KA17.
5. D. M. Eagles: Phys. Status Solidi B 48 (1971) 407.
6. D. M. Eagles and P. Lalousis: J. Phys. C 17 (1984) 655.
7. A. Kosola, M. Putkonen, L.-S. Johansson, and L. Niinistö: Appl. Surf. Sci. 211 (2003) 102.
8. N. Shirakawa, S. Ikeda, and K. Uchida: Japan Patent 331339 (2005).
9. H. Wei, W. M. Friedrichs, G. Lilienkamp, V. Kempter, J. Helmbold, K. Gömann, and G. Borchardt: J. Electroceram. 8 (2002) 221.
10. B. Psiuk, J. Szade, H. Schroeder, H. Haselier, M. Mlynarczyk, R. Waser, and K. Szot: Appl. Phys. A 89 (2007) 451.
11. Q. H. Wu, M. Liu, and W. Jaegermann: Mater. Lett. 59 (2005) 1980.
12. T. Hara, T. Ishiguro, and K. Shinozaki: Jpn. J. Appl. Phys. 49 (2010) 041104.
13. K. Shibuya, S. Mi, C. L. Jia, P. Meuffels, and R. Dittmann: Appl. Phys. Lett. 92 (2008) 241918.
14. K. Szot and W. Speier: Phys. Rev. B 60 (1999) 5909.
15. A. Gunhold, L. Beuermann, M. Frerichs, V. Kempter, K. Gomann, G. Borchardt, and W. Maus-Friedrichs: Surf. Sci. 523 (2003) 80.
16. K. Szot, W. Speier, J. Herion, and Ch. Freiburg: Appl. Phys. A 64 (1996) 55.
17. B. R. Kalkhoran: Dr. Thesis, Faculty of Chemistry, University of Stuttgart, Stuttgard (2004).
18. H. Tanaka, T. Matsumoto, T. Kawai, and S. Kawai: Surf. Sci. 318 (1994) 29.
19. Y. Liang and D. A. Bonnell: Surf. Sci. 310 (1994) 128.
20. R. Waser and M. Aono: Nat. Mater. 6 (2007) 833.
21. A. Raith, P. Reijnen, and R. Waser: Ber. Bunsenges. Phys. Chem. 92 (1988) 1516.
22. Q. Jiang and J. Zegenhagen: Surf. Sci. Lett. 367 (1996) L42.
23. R. Wang, Y. Zhu, and S. M. Shapiro: Phys. Rev. Lett. 80 (1998) 2370.
24. M. Iwase, E. Ichise, M. Takeuchi, and T. Yamasaki: Trans. Jpn. Inst. Met. 25 (1984) 43.