SCOPUS 정보 검색 플랫폼

Sensors and Actuators, B: Chemical

Volumn 136, Issue 2, 2009, Pages 489-493

Oxygen sensitivity of SrTiO3 thin film prepared using atomic layer deposition

(2) Hara, Toru a Ishiguro, Takashi a

a TAIYO YUDEN CO LTD (Japan)

Author keywords

Atomic layer deposition; Gas sensor; SrTiO3

Indexed keywords

ATOMS; CHEMICAL SENSORS; DEPOSITION; FILM PREPARATION; OXYGEN; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES; STRONTIUM ALLOYS; STRONTIUM TITANATES; THIN FILMS;

HIGH OXYGENS; MASS PRODUCTION; OXYGEN CONTAMINATION; OXYGEN SENSITIVITY; SEMICONDUCTOR MANUFACTURING PROCESS; SRTIO;

ATOMIC LAYER DEPOSITION;

EID: 77949724801 PISSN: 09254005 EISSN: None Source Type: Journal
DOI: 10.1016/j.snb.2008.12.026 Document Type: Article

Times cited : (49)

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