Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

Precision Engineering

Volumn 35, Issue 1, 2011, Pages 173-182

  Xie, J ^a   Zhuo, Y W ^a   Tan, T W ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Aspect ratio; Diamond grinding wheel; Form accuracy; Micro grinding; Micro pyramid structured surface; Wheel V tip truing

Indexed keywords

DEPTH OF CUT; DIAMOND CRYSTALS; DIAMOND GRINDING WHEEL; EXPERIMENTAL STUDIES; FEED SPEED; FORM ERRORS; FORM-ACCURACY; GRINDING PARAMETERS; HIGH ASPECT RATIO; ITERATIVE CLOSEST POINT ALGORITHM; LASER MACHINING; MATERIAL REMOVAL; MEASURED POINTS; MECHANICAL FABRICATION; MECHANICAL PROCESS; MICRO TOPOGRAPHY; MICRO-GRINDING; MICRO-PYRAMID ARRAYS; MICRO-PYRAMIDS; RANDOMLY DISTRIBUTED; SILICON CRYSTAL; SILICON SURFACES; SURFACE QUALITIES; TIP RADIUS; TOOLPATHS; V-GROOVE; WHEEL TOPOGRAPHY; WHITE-LIGHT INTERFEROMETER;

ABRASIVES; CRYSTAL ORIENTATION; DIAMONDS; GRINDING (MACHINING); GRINDING MACHINES; GRINDING MILLS; GRINDING WHEELS; SURFACE ROUGHNESS; SURFACES; TOPOGRAPHY;

ASPECT RATIO;

EID: 78049240405     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.09.002     Document Type: Article

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