Extended soft X-ray emission spectroscopy: Quantitative assessment of emission intensities

Journal of Synchrotron Radiation

Volumn 17, Issue 6, 2010, Pages 791-798

  Pistor, Paul ^a   Kötschau, Immo ^a   Grimm, Alex ^a   Jung, Christian ^a   Lauermann, Iver ^a   Lux Steiner, Martha Ch ^a,b   Fischer, Christian H ^a,b  

^a HAHN MEITNER INSTITUT   (Germany)

^b FREIE UNIVERSITÄT BERLIN   (Germany)

Author keywords

film thickness; quantitative evaluation; roughness; soft X ray emission spectroscopy; SXES; XES scan

Indexed keywords

QUANTITATIVE EVALUATION; ROUGHNESS; SOFT X RAY EMISSION SPECTROSCOPY; SXES; XES SCAN;

ELECTROMAGNETIC WAVE EMISSION; EMISSION SPECTROSCOPY; GALLIUM; ION BEAMS; MOLYBDENUM COMPOUNDS; SPECTRUM ANALYSIS; STRONTIUM COMPOUNDS; SUBSTRATES; SULFUR; SUN; X RAY LITHOGRAPHY; X RAY SCATTERING; X RAYS; ZINC OXIDE;

QUALITY CONTROL;

EID: 77958577902     PISSN: 09090495     EISSN: 16005775     Source Type: Journal    
DOI: 10.1107/S0909049510031444     Document Type: Article

References (13)

1. Borie, B. (1981). J. Appl. Cryst. 14, 219-222.
2. Henke, B. L., Gullikson, E. M. & Davis, J. C. (1993). Atom. Data Nucl. Data Tables, 54, 181-342.
3. Heske, C. et al. (1999). Appl. Phys. Lett. 74, 1451-1453.
4. Heske, C., Groh, U., Fuchs, O., Weinhardt, L., Umbach, E., Grün, M., Petillon, S., Dinger, A., Klingshirn, C., Szuszkiewicz, W. & Fleszar, A. (2003). Appl. Phys. Lett. 83, 2360-2362.
5. Jenkins, R., Gould, R. W. & Gedcke, D. (1981). Quantitative X-ray Spectroscopy, 1st ed. New York/Basel: Marcel Dekker.
6. Jung, C., Eggenstein, F., Hartlaub, S., Follath, R., Schmidt, J. S., Senf, F., Weiss, M. R., Zeschke, Th. & Gudat, W. (2001). Nucl. Instrum. Methods Phys. Res. A, 467-468, 485-487.
7. Klaer, J., Luck, I., Boden, A., Klenk, R., Gavilanes Perez, I. & Scheer, R. (2003). Thin Solid Films, 431-432, 534-537.
8. Kötschau, I. M., Weber, A., Pistor, P., Lauermann, I., Fischer, Ch.-H. & Schock, H. W. (2007). Thin Solid Films, 515, 5992-5996.
9. Mönig, H., Lauermann, I., Grimm, A., Camus, C., Kaufmann, C. A., Pistor, P., Jung, Ch., Kropp, T., Lux-Steiner, M. C. & Fischer, Ch.-H. (2008). Appl. Surf. Sci. 255, 2474-2477.
10. Nordgren, J. & Guo, J. (2000). J. Electron Spectrosc. Relat. Phenom. 110-111, 1-13.
11. Rusu, M., Bär, M., Lehmann, S., Sadewasser, S., Weinhardt, L., Kaufmann, C. A., Strub, E., Röhrich, J., Bohne, W., Lauermann, I., Jung, Ch., Heske, C. & Lux-Steiner, M. Ch. (2009). Appl. Phys. Lett. 95, 173502.
12. Tertian, R. & Claissse, F. (1982). Principles of Quantitative X-ray Fluorescence Analysis. London/Philadelphia/Rheine: Heyden.
13. Weinhardt, L., Blum, M., Bär, M., Heske, C., Fuchs, O., Umbach, E., Denlinger, J. D., Ramanathan, K. & Noufi, R. (2007). Thin Solid Films, 515, 6119-6122.