Property engineering In BaTIO3 films by stoichiometry control

Journal of Materials Research

Volumn 25, Issue 6, 2010, Pages 1064-1071

  Ihlefeld, J F ^a,b   Daniels, P R ^a   Aygiin, S M ^a   Borland, W J ^c   Maria, J P ^a  

^a North Carolina State University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c DUPONT COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; AVERAGE GRAIN SIZE; B-SITE CATIONS; BARIUM CONCENTRATIONS; CHEMICAL SOLUTION DEPOSITION; COPPER SUBSTRATES; DWELL TIME; GRAIN SIZE; HIGH TEMPERATURE; HIGH-RESOLUTION ELECTRON MICROSCOPY ANALYSIS; IDENTICAL CONDITIONS; LARGE DEVIATIONS; LOW THERMAL BUDGET; METALLIC FOILS; MICRO-STRUCTURAL; PERMITTIVITY VALUES; PHASE ASSEMBLAGES; ROOM TEMPERATURE; SAMPLE SETS; SECONDARY PHASIS; STOICHIOMETRY CONTROL;

ANNEALING; BARIUM; BARIUM COMPOUNDS; DEPOSITION; FILM PREPARATION; GRAIN SIZE AND SHAPE; HIGH RESOLUTION ELECTRON MICROSCOPY; PERMITTIVITY; STOICHIOMETRY; THIN FILMS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

GRAIN GROWTH;

EID: 77958142488     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2010.0151     Document Type: Article

References (36)

1. W. Jillek and W.K.C. Yung: Embedded eomponents in printed circuit boards: A processing technology review. Int. J. Adv. Manuf. Technol. 25, 350 (2005).
2. D.J. Kim, D.Y. Kaufman, S.K. Streiffer, T.H. Lee, R. Erck, and O. Aueiello: Chemical solution deposition of PLZT films on base metal foils, in ferroelectric Thin Films XI, edited by D.Y. Kaufman, S. Hoffmann-Eifert, S.R. Gilbert, A. Aggarwal, and M. Shimizu (Mater. Res. Soe. Symp. Proc. 748, Warrendale, PA, 2003), pp. 457-462.
3. J. Ihlefeld, B. Laughlin, A. Hunt-Lowery, W. Borland, A. Kingon, and J-P. Maria: Copper compatible barium titanate thin films for embedded passives. J. Electroceram. 14, 95 (2005).
4. M.D. Losego, L.H. Jimison, J.F. Ihlefeld, and J-P. Maria: Ferroelectric response from lead zirconate titanate thin films prepared directly on low-resistivity copper substrates, Appl. Phys. Lett. 86, 172906 (2005).
5. J-P. Maria, K. Cheek, S. Streiffer. S.H. Kim, G. Dunn, and A. Kingon: Lead zirconate titanate thin films on base-metal foils: An approach for embedded high-permittivity passive components. J. Am. Ceram. Soc. 84, 2436 (2001).
6. K. Saegusa: Preparation and electrical properties of sol-gel derived lead zirconate titanate glass-ceramic thin films on metal foil substrates. Jpn. J. Appl. Phys. 1(36), 6888 (1997).
7. Q. Zou. H.E. Ruda, B.G. Yacobi, K. Saegusa, and M. Farrell: Dielectric properties of lead zirconate titanate thin films deposited on metal foils. Appl. Phys. Lett. 77, 1038 (2000).
8. J. Sigman, G.L. Brcnnecka, P.G. Clem, and B.A. Turtle: Fabrication of perovskite-based high-value integrated capacitors by chemical solution deposition. J. Am. Ceram. Soc. 91, 1851 (2008).
9. 3 thin films on Ni foils: Microstructure and interfaces. J. Am. Ceram. Soc. 91, 1845 (2008).
10. th IEEE International Symposium on Applications of Ferroelectrics (IEEE. New York. 2007), pp. 549-552.
11. G. Arlt, D. Hennings, and G. de With: Dielectric-properties of fine-grained barium-titanate ceramics. J. Appl. Phys. 58, 1619 (1985).
12. S.M. Aygun, P. Daniels. W. Borland, and J.P. Maria: Hot sputtering of barium strontium titanale on nickel foils. J. Appl. Phys. 103, 084123(2008).
13. J.F. Ihlefeld, W.J. Borland, and J-P. Maria: Enhanced dielectric and crystalline properties in ferroelectric barium titanate thin films. Adv. Fund. Mater. 17, 1199 (2007).
14. J.F. Ihlefeld, A.M. Vodnick, S.P. Baker, W.J. Borland, and J-P. Maria: Extrinsic sealing effects on the dielectric response of ferroelectric thin films. J. Appl. Phys. 103, 074112 (2008).
15. M.H. Frey, Z. Xu, P. Han, and D.A. Payne: The role of interfaces on an apparent grain size effect on the dielectric properties for ferroelectric barium titanate ceramics. Ferroelectrics 206, 337 (1998).
16. M.M. Saad, P. Baxter, R.M. Bowman, J.M. Gregg, F.D. Morrison, and J.F. Scott: Intrinsic dielectric response in ferroelectric nano-capacitors. J. Phys. Condens. Matter 16, L451 (2004).
17. J.F. Ihlefeld: Synthesis and properties of barium titanate solid solution thin films on copper substrates, Ph.D. dissertation in Materials Science and Engineering (North Carolina State University, 2006).
18. S. Hoffmann and R. Waser: Control of the morphology of CSD-prcparcd (Ba,Sr)TiO thin films, J. Eur. Ceram. Soc. 19, 1339 (1999).
19. 3 thin films. J. Am. Ceram. Soc. 82, 2359 (1999).
20. 3 thin films fabricated on (100) nickel tapes. Appl. Phys. Lett. 81, 3028 (2002).
21. Standard test methods for determining average grain size. ASTM E 112-96, in Annual Book of ASTM Standards (ASTM International, West Conshohocken, PA, 2003).
22. A. von Hippel, R.G. Breckenridge, F.G. Chesley, and L. Tisza: High-dielectric constant ceramics. Ind. Eng. Chem. 38, 1097 (1946).
23. 3 thin films. Appl. Phys. Lett. 81, 340 (2002).
24. 3. J. Am. Ceram. Soc. 64, 448 (1981).
25. 3. J. Am. Ceram. Soc. 68, 372 (1985).
26. 2 metal oxide alloys, j. Mater. Res. 17, 1571 (2002).
27. I. Barin: Thermochemical Data of Pure Substances (VCH, Weinheim, Federal Republic of Germany, New York, 1989).
28. M.H. Frey and D.A. Payne: Grain-size effect on structure and phase transformations for barium titanate. Phys. Rev. B: Condens. Mailer 54, 3158(1996).
29. 3. J. Appl. Phys. 101, 054119 (2007).
30. S. Lee, C.A. Randall, and Z.K. Liu: Modified phase diagram for the barium oxide-titanium dioxide system for the ferroelectric barium titanate. J. Am. Ceram. Soc. 90, 2589 (2007).
31. S. Lee, C.A. Randall, and Z.K. Liu: Comprehensive linkage of defect and phase equilibria through ferroelectric transition behavior in BaTiO3 based dielectrics: Part I. Defect energies under ambient air conditions. J. Am. Ceram. Soc. 91, 1748 (2008).
32. S. Lee, C.A. Randall, and Z.K. Liu: Comprehensive linkage of defect and phase equilibria through ferroelectric transition behavior in BaTiO3-based dielectrics: Part 2. Defect modeling under low oxygen partial pressure conditions. J. Am. Ceram. Soc. 91, 1753 (2008).
33. T.F Lin, C.T. Hu, and I.N. Lin: Influence of stoichiometry on the microstructure and positive temperature-coefficient of resistivity of semiconducting barium-litanate ceramics. J. Am. Ceram. Soc. 73,531(1990).
34. F. Kulesar: A microstructure study of barium titanate ceramics. J. Am. Ceram. Soc. 39, 13 (1955).
35. 3 ceramics. Cryst. Res. Technol. 35, 609 (2000).
36. G.V. Lewis and C.R.A. Catlow: Computer modeling of barium-litanate. Radiat. Eff. Defects Solids 73, 307 (1983).