Quantitative-phase-contrast imaging of a two-level surface described as a 2D linear filtering process

Optics Express

Volumn 18, Issue 20, 2010, Pages 20585-20594

  Lovicar, Luděk ^a   Komrska, Jiří ^a   Chmelík, Radim ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LINEAR SYSTEMS; MATHEMATICAL TRANSFORMATIONS; TWO DIMENSIONAL;

COHERENT TRANSFER FUNCTIONS; CRYSTAL STRUCTURE ANALYSIS; D-FUNCTION; IMAGING PROCESS; LINEAR FILTERING; PERIODIC SURFACES; PHASE IMAGE; PHASE IMAGING; PHASE-CONTRAST IMAGING; STRUCTURE AMPLITUDE; SURFACE GEOMETRIES; SURFACE RELIEFS; THEORETICAL RESULT;

FOURIER TRANSFORMS;

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; CRYSTALLIZATION; EQUIPMENT DESIGN; FOURIER ANALYSIS; HOLOGRAPHY; IMAGE PROCESSING; INTERFEROMETRY; LIGHT; METHODOLOGY; PHASE CONTRAST MICROSCOPY; SCANNING ELECTRON MICROSCOPY; STATISTICAL MODEL; SURFACE PROPERTY; THREE DIMENSIONAL IMAGING;

CRYSTALLIZATION; EQUIPMENT DESIGN; FOURIER ANALYSIS; HOLOGRAPHY; IMAGE PROCESSING, COMPUTER-ASSISTED; IMAGING, THREE-DIMENSIONAL; INTERFEROMETRY; LIGHT; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, PHASE-CONTRAST; MODELS, STATISTICAL; SILICON; SURFACE PROPERTIES;

EID: 77958011630     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.020585     Document Type: Article

References (18)

1. T. Wilson, and C. J. R. Sheppard, Theory and practice of scanning optical microscopy (Academic Press, 1984).
2. J. T. Sheridan, and C. J. R. Sheppard, "Modelling of images of square-wave gratings and isolated edges using rigorous diffraction theory," Opt. Commun. 105(5-6), 367-378 (1994).
3. J. T. Sheridan, and C. J. R. Sheppard, "Coherent imaging of periodic thick fine isolated structures," J. Opt. Soc. Am. A 10(4), 614-632 (1993).
4. M. Gu, and C. J. R. Sheppard, "Effects of defocus and primary spherical aberrations on images of a straight edge in confocal microscopy," Appl. Opt. 33(4), 625-630 (1994).
5. J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, "Axial subnanometer accuracy in digital holographic microscopy," Meas. Sci. Technol. 19(7), 074007 (2008).
6. S. D. Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. D. Natale, and M. Chiarini, "Surface topography of microstructures in lithium niobate by digital holographic microscopy," Meas. Sci. Technol. 15(5), 961-968 (2004).
7. Y. Emery, E. Cuche, F. Marquet, S. Bourquin, P. Marquet, J. Kühn, N. Aspert, M. Botkin, and Ch. Depeursinge, "Digital Holographic Microscopy (DHM): Fast and Robust 3D measurements with interferometric resolution for industrial inspection," in Fringe 2005-New Optical Sensors and Measurement Systems (Springer, (2006), pp. 667-671.
8. Y. Emery, E. Cuche, F. Marquet, N. Aspert, P. Marquet, J. Kühn, M. Botkine, T. Colomb, F. Montfort, F. Charrière, Ch. Depeursinge, P. Debergh, and R. Conde, "Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS," Proc. SPIE 6186, art. no. 61860N (2006).
9. R. Chmelík, "Three-dimensional scalar imaging in high-aperture low-coherence interference and holographic microscopes," J. Mod. Opt. 53(18), 2673-2689 (2006).
10. R. Chmelik, H. Uhlirova, P. Kolman, and P. Vesely, "Wide Range Coherence Digital Holographic Microscope," in Digital Holography and Three-Dimensional Imaging, Technical Digest (CD) (Optical Society of America,2010), paper DTuA6. http://www.opticsinfobase.org/abstract.cfm?URI=DH- 2010-DTuA6
11. J. Komrska, " The Fourier transform of lattices," in Proceedings of the International Summer School 27th May-5th June 1991, Chlumu Třeboně, Czechoslovakia, L. Eckertová and T. Růžička, eds. (Institute of Physics Publishing, Bristol and Philadephia), pp. 87-113.
12. R. Bracewell, The Fourier Transform and Its Applications (McGraw-Hill, 1965), Chap. 6.
13. M. von Laue, and E. H. Wagner, Röntgenstrahl-Interferenzen (Akademische Verlagsgesellschaft, 1960), Chap. 3. www.Luxpop.com: Thin film and bulk index of refraction and photonics calculations.
14. th ed. (Cambridge University Press, 2002), Chap. 1.
15. J. Komrska, "Algebraic expressions of shape amplitudes of polygons and polyhedra," Optik (Stuttg.) 80, 171-183 (1988).
16. J. Komrska, "Simple derivation of formulas for Fraunhofer diffraction at polygonal apertures," J. Opt. Soc. 72(10), 1382-1384 (1982).
17. R. Chmelík and Z. Harna, "Parallel-mode confocal microscope," Opt. Eng. 38, 1635-1639 (1999).
18. E. N. Leith, and J. Upatnieks, "Holography with Achromatic-Fringe Systems," J. Opt. Soc. Am. A 57(8), 975-980 (1967).