Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Emery, Yves ^a   Cuche, Etienne ^a   Marquet, François ^a   Aspert, Nicolas ^a   Marquet, Pierre ^c   Kuhn, Jonas ^b   Botkine, Mikhail ^b   Colomb, Tristan ^b   Montfort, Frédéric ^b   Charrière, Florian ^b   Depeursinge, Christian ^b   Debergh, Patrick ^d   Conde, Ramiro ^d  

^a Lyncee Tec SA   (Switzerland)

^b EPFL   (Switzerland)

^c DEPT UNIV DE PSYCHIATRIE ADULTE   (Switzerland)

^d Colibrys SA ^*  (Switzerland)

Author keywords

Digital Holography Microscopy; MEMS; MOEMS; Real time 3D optical topography

Indexed keywords

CAMERAS; HOLOGRAPHY; IMAGE ANALYSIS; MICROSCOPIC EXAMINATION; NATURAL FREQUENCIES; REAL TIME SYSTEMS;

DIGITAL HOLOGRAPHY MICROSCOPY; IMAGE ACQUISITION; MOEMS; REAL TIME 3D OPTICAL TOPOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 33746684378     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.660029     Document Type: Conference Paper

References (3)

1. S. Petitgrand, "3D measurement of micromechanical devices vibration mode shapes by stroboscopic microscopic interferometry", Optics and Lasers in Engineering, 36, pp.77-101 (2001).
2. Denis Gabor, "A new microscopic principle", Nature, 1948.
3. Etienne Cuche, Pierre Marquet, and Christian Depeursinge "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms", Appl. Opt. 38, pp. 6994-7001, (1999).