Fabrication of superficial neuromast inspired capacitive flow sensors

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Izadi, N ^a   De Boer, M J ^a   Berenschot, J W ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MEASUREMENTS; COUNTER ELECTRODES; DENSE ARRAYS; DISTRIBUTED SENSING; FABRICATED DEVICE; FABRICATION PROCESS; FLOW-SENSORS; INTEGRATED ELECTRODES; LOW POWER; SENSOR READOUT; SHORT CIRCUIT; SQUEEZE-FILM DAMPING; SU-8 MEMBRANES; SUPERFICIAL NEUROMASTS;

ELECTRODES; FABRICATION;

SENSORS;

EID: 77957844384     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085041     Document Type: Article

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