Bio-inspired MEMS resonant thermal detector

IET Seminar Digest

Volumn 2006, Issue 11367, 2006, Pages 83-90

  McNie, M E ^a   Combes, D J ^a   Davies, R R ^a   Brunson, K M ^a   Lewis, K L ^a   Hamilton, D J ^a   Mankondo, L ^a   Anthony, C J ^b   Hill, C A ^a   Harris, M ^a   Donohue, P P ^a   Todd, M A ^a  

^a QINETIQ   (United Kingdom)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

CMOS; Infrared; MEMS; Resonator; Thermal

Indexed keywords

BIO-INSPIRED; CMOS; INFRARED; LOW COSTS; NATURAL WORLD; RESONANT ELEMENTS; SILICON CMOS; STANDARD MATERIALS; THERMAL; THERMAL DETECTORS; THERMAL RADIATIONS; THERMAL SENSITIVITY; UNCOOLED;

ACTUATORS; MEMS; MICROSENSORS; RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 67649933524     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ic:20060449     Document Type: Conference Paper

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