Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone

Microelectronics Journal

Volumn 38, Issue 10-11, 2007, Pages 1021-1026

  Xue, Chenyang ^a   Chen, Shang ^a   Zhang, Wendong ^a   Zhang, Binzhen ^a   Zhang, Guojun ^a   Qiao, Hui ^a  

^a NORTH UNIVERSITY OF CHINA   (China)

Author keywords

Bionic; Low frequency; MEMS; Vector hydrophone

Indexed keywords

ACOUSTIC MEASURING INSTRUMENTS; BIONICS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROSTRUCTURE;

BIONIC VECTOR HYDROPHONE; MINIATURE STRUCTURE;

MEMS;

EID: 35848952087     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.09.008     Document Type: Article

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