Thin silicon films synthesis by AIC on ONO coated metal foils

Energy Procedia

Volumn 2, Issue 1, 2010, Pages 189-194

  Prathap, P ^a   Slaoui, A ^a   Maeder, X ^b  

^a Faculté de Médecine   (France)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Aluminium induced crystallization; Flexible substrates; Intragrain defects; Polycrystalline silicon films

Indexed keywords

ALUMINIUM-INDUCED CRYSTALLIZATION; AVERAGE GRAIN SIZE; COATED METALS; CRYSTALLISATION; CRYSTALLOGRAPHIC QUALITY; DEFECT DISTRIBUTION; DIFFUSION BARRIER LAYERS; ELECTRON BACKSCATTERED DIFFRACTION ANALYSIS; FLEXIBLE SUBSTRATE; GRAIN SIZE; HIGHER TEMPERATURES; INTRAGRAIN DEFECTS; LARGE-GRAIN; LOW COSTS; METALLIC SUBSTRATE; POLY-CRYSTALLINE SILICON; POLYCRYSTALLINE SILICON FILMS; REFLECTION SPECTROSCOPY; SEED LAYER; SI LAYER; THERMAL STABILITY; THIN FILM CRYSTALLINE SILICON; THIN FILM SOLAR CELLS; THIN SILICON FILMS;

ALUMINUM; CHEMICAL STABILITY; CRYSTALLIZATION; DEFECTS; DIFFUSION BARRIERS; GRAIN SIZE AND SHAPE; METAL FOIL; METALLIC FILMS; PHOTOVOLTAIC EFFECTS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; SOLAR CELLS; THERMODYNAMIC STABILITY; THIN FILMS; VAPOR DEPOSITION;

SUBSTRATES;

EID: 77957808882     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2010.07.027     Document Type: Conference Paper

References (12)

1. O. Tuzun, J.M. Auger, I. Gordon, A. Focsa, P.C. Montgomery, C. Maurice, A. Slaoui, G. Beaucarne, and J. Poortmans Thin Solid Films 516 2008 6882
2. E. Pihan, A. Slaoui, and C. Maurice J. Cryst. Growth 305 2007 88
3. I. Gordon, D.V. Gestel, K.V. Nieuwenhuysen, L. Carnel, G. Beaucarne, and J. Portmans Thin Solid Films 487 2005 113
4. P. Pathi, O. Tuzun, and A. Slaoui Mater. Res. Soc. Symp. Proc. 2009 1153-A05-04
5. A. Slaoui, M. Rusu, A. Focsa, R. Torrecillas, E. Alvarez, A. Gutjar, Proc. 9th IEEE Photovoltaic Specialists Conference, New Orleans (USA), 2002, pp. 90.
6. G.L. Graff, R.E. Williford, and P.E. Burrows J. Appl. Phys. 96 2004 1840
7. A.G. Erlat, B.M. Henry, C.R.M. Grovenor, A.G.D. Briggs, R.J. Chater, and Y. Tsukahara J. Phys.B 108 2004 883
8. P.C. Montgomery, A. Benatmane, E. Fogarassy, and J.P. Ponpon Mater. Sci. Eng. B 91 2002 79
9. W. Fuhs, S. Gall, B. Rau, M. Schmidt, and J. Schneider Solar Energy 77 2004 961
10. V. Paillard, P. Puech, M.A. Laguna, P. Temple-Boyer, and B. de Mauduit Appl. Phys. Lett. 73 1998 1718
11. F. Liu, M.J. Romero, K.M. Jones, A.G. Norman, M.M. Al-Jassim, Di. Inns, and A.G. Aberle Thin Solid Films 516 2008 6409
12. A.S. da Silva Sobrinho, G. Czeremuszkin, M. Latreche, and M.R. Wertheimer J.Vac. Sci. Technol. A 18 2000 149