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Volumn 20, Issue 10, 2010, Pages 536-538

Silicon filled integrated waveguides

Author keywords

Millimeter wave; silicon filled; silicon on glass; substrate integrated waveguide (SIW); substrate transfer

Indexed keywords

AVERAGE LOSS; DEGREE OF CONTROL; FABRICATION PROCESS; GEOMETRICAL DIMENSIONS; HFSS SIMULATION; INTEGRATED WAVEGUIDES; MEASUREMENT RESULTS; MM-WAVE; NEW COMPONENTS; OPERATING MODES; SILICON-ON-GLASS; SLOW-WAVE FACTOR; SUBSTRATE TRANSFER; WAVEGUIDE STRUCTURE;

EID: 77957769285     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2010.2063420     Document Type: Article
Times cited : (6)

References (12)
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    • P. Pal, K. Sato, and S. Chandra, "Fabrication techniques of convex corners in a (100)-silicon wafer using bulk micromachining: A review", J. Micromech. Microeng., pp. 17:R111-R133, Oct. 2007.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.