High-performance varactor diodes integrated in a silicon-on-glass technology

Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference

Volumn 2005, Issue , 2005, Pages 117-120

  Buisman, K ^a   Nanver, L K ^a   Scholtes, T L M ^a   Schellevis, H ^a   De Vreede, L C N ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANNEALING; COPPER PLATING; GLASS; LASER BEAM EFFECTS; PASSIVATION; SEMICONDUCTOR DOPING; SILICON WAFERS;

QUALITY FACTORS; SCHOTTKY VARACTOR DIODES; SILICON ON GLASS TECHNOLOGY;

VARACTORS;

EID: 33748342224     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDER.2005.1546599     Document Type: Conference Paper

References (7)

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