SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 28, Issue 5, 2010, Pages 916-920

Planarization of high aspect ratio p-i-n diode pillar arrays for blanket electrical contacts

(8) Voss, L F a Shao, Q a Reinhardt, C E a Graff, R T a Conway, A M a Nikolic R J a Deo, Nirmalendu b Cheung, Chin Li b

a LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

b UNIVERSITY OF NEBRASKA LINCOLN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COATINGS; ELECTRIC CONTACTS;

CONFORMAL COATINGS; ELECTRICAL CONTACTS; HIGH ASPECT RATIO; PILLAR ARRAYS; PILLAR STRUCTURE; PIN DIODE; PLANARIZATION; PLANARIZATION TECHNIQUE; PLANARIZING; REACTIVE ION;

PHOTORESISTS;

EID: 77957736736 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3478306 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.