Optimization of spin-on-glass process for multilevel metal interconnects

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2001, Pages 136-139

  Madayag, A C ^a   Zhou, Z ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CURING; ELECTRIC INSULATION; OPTIMIZATION; PERMITTIVITY; SILICA; SINTERING; SPIN GLASS;

METAL INTERCONNECTS;

DIELECTRIC MATERIALS;

EID: 0035158942     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Analysis of drying shrinkage and flow due to surface tension of spin-coated films on topographic substrates
2. The fabrication on nonplanar spin-on glass microstructures