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Journal of Electronic Materials

Volumn 39, Issue 3, 2010, Pages 263-267

Etching of 10boron with SF 6-based electron cyclotron resonance plasmas for pillar-structured thermal neutron detectors

(7) Voss, L F a Reinhardt, C E a Graff, R T a Conway, A M a Nikolic R J a Deo, N b Cheung, C L b

a LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

b UNIVERSITY OF NEBRASKA LINCOLN (United States)

Author keywords

Boron; Detector; Etch; Neutron; Plasma; Radiation

Indexed keywords

ELECTRON CYCLOTRON RESONANCE PLASMA; ETCH MORPHOLOGY; ETCH RATES; GAS FLOWRATE; ISOTOPICALLY ENRICHED; PLASMA RADIATION; RADIO FREQUENCY POWER; SEM; THERMAL NEUTRON DETECTORS;

BORON; BORON COMPOUNDS; CYCLOTRONS; DETECTORS; ELECTRON CYCLOTRON RESONANCE; GAS MIXTURES; NEUTRON DETECTORS; NEUTRONS; PLANTS (BOTANY); PLASMAS; RESONANCE; SCANNING ELECTRON MICROSCOPY;

NEUTRON IRRADIATION;

EID: 77951022276 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-009-1068-9 Document Type: Article

Times cited : (12)

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