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Review of Scientific Instruments

Volumn 81, Issue 7, 2010, Pages

Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam

(3) Liese, Tobias a Radisch, Volker a Krebs, Hans Ulrich a

a UNIVERSITY OF GÖTTINGEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FOCAL LENGTHS; FOCUSED ION BEAM MACHINING; FRESNEL ZONE PLATE LENS; MICRO-LENS; MULTILAYER LAUE LENS; MULTILAYER STRUCTURES; TEST STRUCTURE; VERY HIGH SPATIAL RESOLUTIONS; WATER WINDOW; X-RAY DIFFRACTIVE; ZONE PLATES;

ASPECT RATIO; FABRICATION; FOCUSED ION BEAMS; LENSES; MULTILAYERS; OPTICAL INSTRUMENTS; PULSED LASER DEPOSITION; PULSED LASERS;

PLATES (STRUCTURAL COMPONENTS);

EID: 77957130106 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3462985 Document Type: Article

Times cited : (28)

References (22)

1
- 0039524135
- edited by G. Schmahl and D. Rudolph (Springer-Verlag, Berlin)
- X-Ray Microscopy, edited by, G. Schmahl, and, D. Rudolph, (Springer-Verlag, Berlin, 1984).
- (1984) X-Ray Microscopy

2
- 0003662962
- edited by J. Thieme, G. Schmahl, D. Rudolph, and E. Umbach (Springer-Verlag, Heidelberg)
- X-Ray Microscopy and Spectromicroscopy, edited by, J. Thieme, G. Schmahl, D. Rudolph, and, E. Umbach, (Springer-Verlag, Heidelberg, 1998).
- (1998) X-Ray Microscopy and Spectromicroscopy

3
- 0003920042
- edited by D. Attwood (Cambridge University Press, Cambridge)
- Soft X-Rays and Extreme Ultraviolet Radiation, edited by, D. Attwood, (Cambridge University Press, Cambridge, 1999).
- (1999) Soft X-Rays and Extreme Ultraviolet Radiation

4
- 77957133269
- APCPCS 0094-243X,. 10.1063/1.33156
- G. Schmahl, D. Rudolph, and B. Niemann, AIP Conf. Proc. APCPCS 0094-243X 75, 225 (1981). 10.1063/1.33156
- (1981) AIP Conf. Proc. , vol.75 , pp. 225
- Schmahl, G.¹ Rudolph, D.² Niemann, B.³

5
- 21744452342
- Soft X-ray microscopy at a spatial resolution better than 15 nm
- DOI 10.1038/nature03719
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature (London) NATUAS 0028-0836 435, 1210 (2005). 10.1038/nature03719 (Pubitemid 40943082)
- (2005) Nature , vol.435 , Issue.7046 , pp. 1210-1213
- Chao, W.¹ Harteneck, B.D.² Liddle, J.A.³ Anderson, E.H.⁴ Attwood, D.T.⁵

6
- 0010599968
- JOSAAH 0030-3941,. 10.1364/JOSA.56.001018
- H. E. Hart, J. B. Scrandis, R. Mark, and R. D. Hatcher, J. Opt. Soc. Am. JOSAAH 0030-3941 56, 1018 (1966). 10.1364/JOSA.56.001018
- (1966) J. Opt. Soc. Am. , vol.56 , pp. 1018
- Hart, H.E.¹ Scrandis, J.B.² Mark, R.³ Hatcher, R.D.⁴

7
- 0037136175
- Multilayer Fresnel zone plate for high-energy X-ray by DC sputtering deposition
- DOI 10.1016/S0042-207X(02)00121-5, PII S0042207X02001215
- S. Tamura, M. Yasumoto, T. Mihara, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, H. Takano, and K. Handa, Vacuum VACUAV 0042-207X 66, 495 (2002). 10.1016/S0042-207X(02)00121-5 (Pubitemid 34862453)
- (2002) Vacuum , vol.66 , Issue.3-4 , pp. 495-499
- Tamura, S.¹ Yasumoto, M.² Mihara, T.³ Kamijo, N.⁴ Suzuki, Y.⁵ Awaji, M.⁶ Takeuchi, A.⁷ Takano, H.⁸ Handa, K.⁹

8
- 0347567219
- RSINAK 0034-6748,. 10.1063/1.1614882
- N. Kamijo, Y. Suzuki, H. Takano, S. Tamura, M. Yasumoto, A. Takeuchi, and M. Awaji, Rev. Sci. Instrum. RSINAK 0034-6748 74, 5101 (2003). 10.1063/1.1614882
- (2003) Rev. Sci. Instrum. , vol.74 , pp. 5101
- Kamijo, N.¹ Suzuki, Y.² Takano, H.³ Tamura, S.⁴ Yasumoto, M.⁵ Takeuchi, A.⁶ Awaji, M.⁷

9
- 73449110926
- JPCSDZ 1742-6588,. 10.1088/1742-6596/186/1/012075
- S. Tamura, M. Yasumoto, N. Kamijo, K. Uesugi, A. Takeuchi, Y. Terada, and Y. Suzuki, J. Phys.: Conf. Ser. JPCSDZ 1742-6588 186, 012075 (2009). 10.1088/1742-6596/186/1/012075
- (2009) J. Phys.: Conf. Ser. , vol.186 , pp. 012075
- Tamura, S.¹ Yasumoto, M.² Kamijo, N.³ Uesugi, K.⁴ Takeuchi, A.⁵ Terada, Y.⁶ Suzuki, Y.⁷

10
- 35348900094
- Bonded Multilayer Laue Lens for focusing hard X-rays
- DOI 10.1016/j.nima.2007.08.077, PII S0168900207017731
- C. Liu, R. Conley, J. Qian, C. M. Kewish, A. T. Macrander, J. Maser, H. C. Kang, H. Yan, and G. B. Stephenson, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 582, 123 (2007). 10.1016/j.nima.2007.08.077 (Pubitemid 47576431)
- (2007) Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , vol.582 , Issue.1 , pp. 123-125
- Liu, C.¹ Conley, R.² Qian, J.³ Kewish, C.M.⁴ Macrander, A.T.⁵ Maser, J.⁶ Kang, H.C.⁷ Yan, H.⁸ Stephenson, G.B.⁹

11
- 0032376344
- JSYRES 0909-0495,. 10.1107/S090904959701666X
- M. Koike, I. H. Suzuki, S. Komiya, and Y. Amemiya, J. Synchrotron Radiat. JSYRES 0909-0495 5, 794 (1998). 10.1107/S090904959701666X
- (1998) J. Synchrotron Radiat. , vol.5 , pp. 794
- Koike, M.¹ Suzuki, I.H.² Komiya, S.³ Amemiya, Y.⁴

12
- 73449083059
- JPCSDZ 1742-6588,. 10.1088/1742-6596/186/1/012074
- H. Takenaka, S. Ichimaru, T. Ohchi, T. Koyama, T. Tsuji, H. Takano, and Y. Tagoshima, J. Phys.: Conf. Ser. JPCSDZ 1742-6588 186, 012074 (2009). 10.1088/1742-6596/186/1/012074
- (2009) J. Phys.: Conf. Ser. , vol.186 , pp. 012074
- Takenaka, H.¹ Ichimaru, S.² Ohchi, T.³ Koyama, T.⁴ Tsuji, T.⁵ Takano, H.⁶ Tagoshima, Y.⁷

13
- 44849137773
- APPLAB 0003-6951,. 10.1063/1.2912503
- H. C. Kang, H. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, Appl. Phys. Lett. APPLAB 0003-6951 92, 221114 (2008). 10.1063/1.2912503
- (2008) Appl. Phys. Lett. , vol.92 , pp. 221114
- Kang, H.C.¹ Yan, H.² Winarski, R.P.³ Holt, M.V.⁴ Maser, J.⁵ Liu, C.⁶ Conley, R.⁷ Vogt, S.⁸ MacRander, A.T.⁹ Stephenson, G.B.¹⁰

14
- 34247590529
- Sectioning of multilayers to make a multilayer Laue lens
- DOI 10.1063/1.2713439
- H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, R. Khachatryan, M. Wieczorek, A. T. Macrander, H. Yan, J. Maser, J. Hiller, and R. Koritala, Rev. Sci. Instrum. RSINAK 0034-6748 78, 046103 (2007). 10.1063/1.2713439 (Pubitemid 46685621)
- (2007) Review of Scientific Instruments , vol.78 , Issue.4 , pp. 046103
- Kang, H.C.¹ Stephenson, G.B.² Liu, C.³ Conley, R.⁴ Khachatryan, R.⁵ Wieczorek, M.⁶ MacRander, A.T.⁷ Yan, H.⁸ Maser, J.⁹ Hiller, J.¹⁰ Koritala, R.¹¹

15
- 36049006222
- XUV laser-plasma source based on solid Ar filament
- DOI 10.1063/1.2801882
- C. Peth, A. Kalinin, F. Barkusky, K. Mann, J. P. Toennies, and L. Y. Rusin, Rev. Sci. Instrum. RSINAK 0034-6748 78, 103509 (2007). 10.1063/1.2801882 (Pubitemid 350098093)
- (2007) Review of Scientific Instruments , vol.78 , Issue.10 , pp. 103509
- Peth, C.¹ Kalinin, A.² Barkusky, F.³ Mann, K.⁴ Peter Toennies, J.⁵ Rusin, L.Y.⁶

16
- 0030563026
- Calculations and experiments of material removal and kinetic energy during pulsed laser ablation of metals
- DOI 10.1016/0169-4332(95)00466-1
- S. Fähler and H. U. Krebs, Appl. Surf. Sci. ASUSEE 0169-4332 96-98, 61 (1996). 10.1016/0169-4332(95)00466-1 (Pubitemid 126373508)
- (1996) Applied Surface Science , vol.96-98 , pp. 61-65
- Fahler, S.¹ Krebs, H.-U.²

17
- 77952985147
- JAPIAU 0021-8979,. 10.1063/1.3388591
- J. Röder, T. Liese, and H. U. Krebs, J. Appl. Phys. JAPIAU 0021-8979 107, 103515 (2010). 10.1063/1.3388591
- (2010) J. Appl. Phys. , vol.107 , pp. 103515
- Röder, J.¹ Liese, T.² Krebs, H.U.³

18
- 0000557297
- APPLAB 0003-6951,. 10.1063/1.109412
- H. U. Krebs and O. Bremert, Appl. Phys. Lett. APPLAB 0003-6951 62, 2341 (1993). 10.1063/1.109412
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2341
- Krebs, H.U.¹ Bremert, O.²

19
- 0001121922
- APAMFC 0947-8396,. 10.1007/s003390051539
- A. Usoskin, H. C. Freyhardt, and H. U. Krebs, Appl. Phys. A: Mater. Sci. Process. APAMFC 0947-8396 69, S823 (1999). 10.1007/s003390051539
- (1999) Appl. Phys. A: Mater. Sci. Process. , vol.69 , pp. 823
- Usoskin, A.¹ Freyhardt, H.C.² Krebs, H.U.³

20
- 77957123196
- (unpublished)
- M. Reese, A. Bayer, P. Gromann, B. Schäfer, K. Mann, T. Liese, and H. U. Krebs, " Sub-micron focusing of XUV radiation from a laser plasma source using a multilayer Laue lens. " (unpublished).
- Sub-micron Focusing of XUV Radiation from A Laser Plasma Source Using A Multilayer Laue Lens
- Reese, M.¹ Bayer, A.² Gromann, P.³ Schäfer, B.⁴ Mann, K.⁵ Liese, T.⁶ Krebs, H.U.⁷

21
- 0041999896
- OPLEDP 0146-9592,. 10.1364/OL.26.001448
- S. Vitta, M. Weisheit, Th. Scharf, and H. U. Krebs, Opt. Lett. OPLEDP 0146-9592 26, 1448 (2001). 10.1364/OL.26.001448
- (2001) Opt. Lett. , vol.26 , pp. 1448
- Vitta, S.¹ Weisheit, M.² Scharf, Th.³ Krebs, H.U.⁴

22
- 10644225296
- APOPAI 0003-6935,. 10.1364/AO.43.006265
- C. Fuhse, H. U. Krebs, S. Vitta, and G. A. Johansson, Appl. Opt. APOPAI 0003-6935 43, 6265 (2004). 10.1364/AO.43.006265
- (2004) Appl. Opt. , vol.43 , pp. 6265
- Fuhse, C.¹ Krebs, H.U.² Vitta, S.³ Johansson, G.A.⁴

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