Fabrication of a valveless micropump with polyimide membrane

IEEJ Transactions on Sensors and Micromachines

Volumn 130, Issue 8, 2010, Pages 378-382

  Liu, Yingwei ^a   Matsuno, Shingo ^a   Komatsuzaki, Hiroki ^a   Imai, Satomitsu ^a   Nishioka, Yasushiro ^a  

^a NIHON UNIVERSITY   (Japan)

Author keywords

Air actuated; Micropump; Polyimide; Surface micromachining; Valveless

Indexed keywords

AIR PRESSURES; FABRICATION PROCESS; MECHANICAL CHARACTERISTICS; MICRO PUMP; NANOLITERS; POLYIMIDE MEMBRANES; STATIC AIR; STATIC PRESSURE LIMIT; SURFACE MICROMACHINING PROCESS; VALVELESS; VALVELESS MICROPUMPS;

ATMOSPHERIC PRESSURE; COMPOSITE MICROMECHANICS; FABRICATION; MEMBRANES; PUMPS; SURFACE MICROMACHINING;

POLYIMIDES;

EID: 77956975365     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.130.378     Document Type: Article

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